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RisePrivate Web>ClimbingRobot > MicroAdhesives>TwentyProcess (24 May 2008, AaronParness)
RisePrivate Web>ClimbingRobot > MicroAdhesives>TwentyProcess (24 May 2008, AaronParness) -- AaronParness - 24 May 2008
Rinse Acetone, Methanol, IPA
Dry
Singe 5 min >100C
Spin Su-8 2035 @1400RPM (30sec @ 500, 30 sec @ 1400)
Prebake 4 min @ 65, 13 min @95C
Karl Suss 2x6.7sec w/ filter 10 sec rest
MERL Angled 23.5 target 14 degrees, 2x7.2sec w/ filter 10 sec rest
PEB 1@65 7@95 1@65
Develop 9min w/ agitation
Post Bake ramp 65 to over 100, 5 min>100C
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