SU-8 Wafer & Mask Holder For Tilted Exposure

This page contains Solidworks file of Wafer & Mask holder. -- SeungBum? - 11 Sep 2006

This is a Wafer & Glass Mask Holder for tilted exposure. It holds wafer & mask firmly so that it makes sure for mask to contact to wafer even at tilted angle.

Angle is adjustable by changing wafer holder's position. Pillars have 3 notches and also base part has 2 notches. By deciding on which notch wafer holder places, we can set holder angle.