Rinse Acetone, Methanol, IPA

Dry

Singe 5min>100C

Spin Su-8 2100 @ 3000RPM (30sec @500, 30sec @3000)

Prebake 5 Min @65 15 min @95C

Spine 2nd layer

Prebake 2nd layer (20 min @95C 2nd time through)

Optional EBR w/ 5cc of IPA on spinner @1500 RPM using syringe

Karl Suss vertical exposure 3x9sec w/ UV filter 10 sec rests

MERL angled exposure @23.5 degrees, target 14, 2x 10 sec w/filter 10 sec rest

Post Exposure Bake 5@65 15@95 2@65

Develop 15 minutes w/ agitation

Hard bake ramp from 65 to over 100 5min>100C