ParyleneCoater

Gaining access to the equipment

Equipment Location: Paul Allen Building Room 155

General training Set up your NEMO Account (Instructions). Watch the required videos and read lab polices (Videos and polices link) After reviewing the materials, complete the Safety quiz Email (snf-access [sticky] stanford [bot] edu) or reply to the auto-confirmation email after passing the quiz to schedule an in-person tour for the Allen building (SNF).

Instrument specific training

Primary Trainer: Gabe Catalano(gcatalano [sticky] stanford [bot] edu)

1. Read relevant materials beforehand
   • Parylene coater instructions
   • Parylene Properties Reference
2. Email the primary trainer to schedule a instrument specific training session .

Operating procedure

System Preparation

1. Enable equipment in NEMO
2. Turn on the Vent and clean the cold trap (if needed) by using soap water spray and Kimwipes.
3. Turn on the Vacuum and wait for the pressure to go below 200mT before turning on the cooler.
4. Wait for 30 minutes for the cooler pump to warm up and prepare samples while waiting.
5. Make an aluminum foil boat using the cylindrical former and fill with appropriate amount of parylene dimer.

   • Mostly 2µm to 5µm thickness range takes about 4g to 8g of dimer.
   • For epoxy mold, used 6g of dimer.

6. Put the aluminum boat in and close the vaporizer door

   • Make sure to put the boat as close to the door and don't push it in too much. This will make it hard to retrieve the boat.

7. Make sure the vacuum chamber has a temperature under 20°C
8. Turn on both 1st and 2nd switches from Disable to Enable and press the start button.

   • 1st Switch : Furnace/Chamber Gauge control switch
   • 2nd Switch : Vaporizer control switch
9. Run the parylene coater

   • Make sure the furnace temperature is approaching the setpoint before leaving for a long run.
   • Can leave the area and comeback when the coating procedure is complete.
   • Procedure may take from 30 minutes to several hours depending on the dimer weight.

Post experiment

1. When coating process is done, green start button light will flash and heaters will be turned off automatically. Press the start button to turn the light off.
2. Toggle 1st (Furnace/Chamber gauge) switch and 2nd (Vaporizer) switch back to Disable.
3. Wait for the temperature from the 3rd screen to reach under 100°C, then turn off the cooler.
4. When the temperature from the 3rd screen goes under at least 40°C take out the aluminum boat and throw it away.
5. Turn the Vacuum switch to Vent mode and lift the lid to unload the sample.
6. Clean the cold hand and lid.

• Cleaning procedure
  1. Put on a second pair of gloves over the first
  2. Rinse the cold trap with Micro90 2% in DI water
  3. Scrape off the parylene deposit with a soft scrub pad (Do not scrape off the deposit with any other tools, as this may scratch the cold trap)
  4. Wipe off other visible particles inside the chamber, lid and o-ring with the clean room wipes and IPA solution if needed.
  5. Throw away the outer gloves after this operation to prevent external tool and room contamination.

7. Close the lid and set Vacuum mode to pump down.
8. Press emergency stop button to completely shut down the machine.
9. Check if chiller is off, 1st and 2nd switch disabled and if the start button light if off as well.
10. When the pressure of the chamber is below 100mT, turn the vacuum switch to Hold position.
11. End session of the machine and sign out of NEMO.